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The feasibility of chalcogenide rib waveguides working at lambda = 10.6microns has been demonstrated. The waveguides comprised a several microns thickTe2As3Se5 film deposited by thermal evaporation on a polished As2S3 glasssubstrate and further etched by physical etching in Ar or CF4/O2 atmosphere.Output images at 10.6 microns and some propagation losses roughly estimated at10dB/cm proved that the obtained structures behaved as channel waveguides witha good lateral confinement of the light. The work opens the doors to therealisation of components able to work in the mid and thermal infrared up to 20microns and even more.

Transmission measurement at 10.6 microns of Te2As3Se5 rib-waveguides on As2S3 substrate