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The detection of higher modes of oscillation in atomic force microscopy can provide additional  information on sample properties. However, the limited bandwidth of the photodiode in the beam  deflection detection technique often limits the detectable frequency range. We present a novel  cantilever design, which allows lowering the frequency of higher modes of oscillation, maintaining  the frequency of the fundamental resonance. Simulations by finite element methods show that the  ratio between the second mode and the fundamental resonance frequency can be adjusted between  2 and 10, compared to 6.3 for the regular rectangular cantilever design. Even stronger changes are  observed for the third oscillation mode, corresponding to a torsional cantilever oscillation.  Cantilevers with modified geometry were fabricated using silicon micromachining processes and  subsequently tested, confirming the results from the simulatio

Modified atomic force microscopy cantilever design to facilitate access of higher modes of oscillation