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In this work we explore the influence of self-affine roughness on the phase maps for microelectromechanical switches in the presence of Casimir and electrostatic forces by taking into account finite plasmon frequency corrections for plate separations smaller than the plasmon wavelength λP. The phase map depends significantly on the characteristic self-affine roughness parameters (roughness amplitude w, lateral correlation length ξ, and Hurst exponent H) leading to decreasing phase area with increasing roughening at short and/or long roughness wavelengths. The roughness influence is shown to be the prominent factor on phase maps for initial plate separations either smaller or larger than the plasmon wavelength λP.

Phase maps of microelectromechanical switches in the presence of the Casimir force and finite plasmon frequency corrections