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Nitrogen-vacancy (NV-) color centers in diamond were created by implantationof 7 keV 15N (I = 1/2) ions into type IIa diamond. Optically detected magneticresonance was employed to measure the hyperfine coupling of the NV- centers.The hyperfine spectrum from 15NV- arising from implanted 15N can bedistinguished from 14NV- centers created by native 14N (I = 1) sites. Analysisindicates 1 in 40 implanted 15N atoms give rise to an optically observable15NV- center. This report ultimately demonstrates a mechanism by which theyield of NV- center formation by nitrogen implantation can be measured.Comment: 14 pages, 3 figures, to appear in Applied Physics Letter

Implantation of labelled single nitrogen vacancy centers in diamond using N15