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The fatigue of the electromechanical properties of tetragonal PbZrx, Ti1-xO3 thin films is investigated. The decrease of electromechanical small-signal response is compared to the fatigue of the electric properties and examined in detail. Property fatigue is attributed mainly to switching-failure of the unit cells. (C) 2005 American Institute of Physics

Effects of ferroelectric fatigue on the piezoelectric properties (d33) of tetragonal lead zirconate titanate thin films