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High-dose phosphorus-ion (P+) implantation into 4H–SiC (0001) followed by high-temperature annealing has been investigated. Annealing with a graphite cap largely suppressed the surface roughening of implanted SiC. The surface stoichiometry of implanted SiC was examined by x-ray photoelectron spectroscopy. Electronic behaviors of P+-implanted SiC are discussed based on Hall effect measurements. There is no significant difference in the sheet resistance between SiC annealed with a graphite cap and without a graphite cap. The sheet resistance (resistivity) takes a minimum value of 45 Ω/□ (0.9 mΩcm) at an implant dose of 6.0×1016 cm−2. The sheet resistance shows a weak temperature dependence.

Electronic behaviors of high-dose phosphorus-ion implanted 4H–SiC (0001)