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We demonstrate a diffraction geometry which provides strong sensitivity to the microstructure of thin films. While a coherent beam of x rays is being reflected from the surface of the sample, measurements were made of the scattering of the exit beam below the critical angle for total external reflection. This results in a strong signal with speckle modulations that are characteristic of the internal arrangement of grains at different depths within the film.

Coherent grazing exit x-ray scattering geometry for probing the structure of thin films