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Thin films of nc-TiC/a-C:H nanocomposite have been deposited by reactive magnetron sputtering at substrate bias values of −240 and −91 V. The grain size and grain separation, which together define the nanostructure, are correlated to the amount of the amorphous phase. From the size of the TiC grains measured by x-ray diffraction and the amorphous hydrogenated carbon (a-C:H) phase content determined by x-ray photoelectron spectroscopy, the mean grain separation is estimated using a simple model for the nanostructure. Films deposited at −240 V show a hardness enhancement for a-C:H phase contents in the range 10% to 30% with TiC grain sizes around 5 nm. The mean grain separation for such films was estimated to be 0.3 nm. Films with higher a-C:H phase contents still have 5 nm small grains, but their mean grain separation is larger than 0.5 nm; their hardness is thus determined by the properties of the amorphous matrix. A less pronounced hardness enhancement is observed for films deposited at −91 V. They have ...

Nanostructural and mechanical properties of nanocomposite nc-TiC/a-C:H films deposited by reactive unbalanced magnetron sputtering