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We report on the transient-enhanced shape transformation of nano-structuredSi(001) surfaces upon in vacuo annealing at relatively low temperatures of1175K - 1225K for a few minutes. We find dramatic surface mass transportconcomitant with the development of low-energy facets on surfaces that arecovered by native oxide. The enhanced surface mass transport ceases after theoxide is completely desorbed, and it is also not observed on surfaces where thenative oxide had been removed by HF before annealing.Comment: 12 pages, 4 figure

Transient-enhanced Si diffusion on native-oxide-covered Si(001) nanostructures during vacuum annealing