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The microstructural, optical and magnetic properties of Mn-implanted p-type GaN were investigated. Dilute magnetic semiconductor was achieved by implanting Mn ions into p-type GaN and subsequently annealing. The Ga-Mn magnetic phases contributing to the ferromagnetic property were produced after annealing Mn-implanted p-type GaN below 800°C.open151

Microstructural, optical, and magnetic properties of Mn-implanted p-type GaN