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It is shown that the superconformal filling (SCF) efficiency($\epsilon_{SCF}$) of nano-scale cavities can be rationalized in terms ofrelevant physical and geometric parameters. Based on extensive numericalsimulations and using the dynamic scaling theory of interface growth, it isconcluded that the relevant quantity for the evaluation of $\epsilon_{SCF}$ isthe so-called "physical" aspect ratio $S_{P} = L/M^{\beta/\alpha}$, where$\alpha$ ($\beta$) is the roughness (growth) exponent that governs the dynamicevolution of the system and $L$ ($M$) is the typical depth (width) of thecavity. The theoretical predictions are in excellent agreement with recentlyreported experimental data for the SCF of electrodeposited copper andchemically deposited silver in confined geometries, thus giving the basis of anew tool to manage nanoengineering-related problems not completely resolved sofar.Comment: 3 pages, 2 figure

A predictive tool in micro- and nanoengineering: Straightforward estimation of conformal film growth efficiency