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We present a method for fabricating Josephson junctions and superconductingquantum interference devices (SQUIDs) which is based on the local anodizationof niobium strip lines 3 to 6.5 nm-thick under the voltage-biased tip of anAtomic Force Microscope. Microbridge junctions and SQUID loops are obtainedeither by partial or total oxidation of the niobium layer. Two types of weaklink geometries are fabricated : lateral constriction (Dayem bridges) andvariable thickness bridges. SQUIDs based on both geometries show a modulationof the maximum Josephson current with a magnetic flux periodic with respect tothe superconducting flux quantum h/2e. They persist up to 4K. The modulationshape and depth for SQUIDs based on variable thickness bridges indicate thatthe weak link size becomes comparable to the superconducting film coherencelength which is of the order of 10nm.Comment: 12 page

Josephson junctions and superconducting quantum interference devices made by local oxidation of niobium ultrathin films