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Recently it was experimentally demonstrated that sputtering under normalincidence leads to the formation of spatially ordered uniform nanoscale islandsor holes. Here we show that these nanostructures have inherently nonlinearorigin, first appearing when the nonlinear terms start to dominate the surfacedynamics. Depending on the sign of the nonlinear terms, determined by the shapeof the collision cascade, the surface can develop regular islands or holes withidentical dynamical features, and while the size of these nanostructures isindependent of flux and temperature, it can be modified by tuning the ionenergy

Quantum dot and hole formation in sputter erosion