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Atomic resolution by noncontact atomic force microscopy with a self-sensing piezoelectric force sensor is presented. The sensor has a stiffness of 1800 N/m and is operated with sub-nanometer amplitudes, allowing atomic resolution with relatively bluntly etched tungsten tips. Sensitivity and noise are discussed

Atomic resolution on Si(111)-(7×7) by noncontact atomic force microscopy with a force sensor based on a quartz tuning fork