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This letter concentrates on a quantitative description of surface roughness effects on Auger peak-line profiles for pure and alloyed specimens. The nanometer lateral electron probe size of the order of 10 nm yielded peak-line profiles that capture surface topology variations down to nanometer-length scales. Surface roughness leads to peak-intensity fluctuations, which are described within the weak roughness limit by a simple form, I(r)≈Iav[1+βh(r)]. Iav is the average peak intensity, h(r) represents the roughness fluctuation along a lateral in-planar distance r, and β is a constant (1/2 showed a power-law behavior Iz(r)∝r^α with α ranging between 0.7 and 1 at small-length scales, i.e., for r«ξ, with ξ a peak correlation length that was comparable to average specimen cluster sizes

Surface sensitivity effects with local probe scanning Auger–scanning electron microscopy