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Metallic oxide films of SrRuO3SrRuO3 deposited on (001) SrTiO3SrTiO3 by pulsed laser deposition have been investigated by transmission electron microscopy (TEM) techniques. These films have a single crystalline structure with an extremely smooth surface. A TEM study of cross-sectional samples shows that the film grew epitaxially on the (001) surface of the SrTiO3SrTiO3 substrate. The films grew along the [110] directions with an in-plane orientation relationship of either SrRuO3SrRuO3[110]//SrTiO3SrTiO3 [100] and SrRuO3SrRuO3[001]//SrTiO3SrTiO3[010], or SrRuO3SrRuO3[110]//SrTiO3SrTiO3[010] and SrRuO3SrRuO3[001]//SrTiO3SrTiO3 [100]. Domains with a rotation of 90° around SrRuO3SrRuO3[110] were observed in the dark-field image of plan-view samples. © 1998 American Institute of Physics

Microstructure of epitaxial SrRuO3 thin films on (001) SrTiO3