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Piezoresistive cantilevers have been utilized in a novel ultrahigh vacuum scanning probe microscope which allows in situscanning tunneling microscopy(STM), contact atomic force microscopy(AFM), and noncontact atomic force microscopy. The instrument uses interchangeable tungsten tips (for STM imaging) and piezoresistive cantilevers (for AFM or STM imaging) and is capable of atomic resolution in both STM and AFM modes of operation. In situ tip exchange under vacuum conditions is performed quickly and reliably using a high precision rotary/linear feedthrough and a tip/cantilever storage system.Piezoresistive force‐sensing cantilevers provide a new detection scheme for AFM, using an all‐electronic detector that requires no alignment or optical detectionsystem. The microscope features a high‐resolution, dual‐axis, inertial‐drive translation stage with an open access sample mount designed to optimize vibration isolation.

Piezoresistive cantilevers utilized for scanning tunneling and scanning force microscope in ultrahigh vacuum