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A simple, versatile device for dispersing micrometer‐ and submicrometer‐sized particles in vacuum is described. The source allows control of particle size (0.5 μm≤l≤200 μm) and particle flux density up to roughly 107 cm−2 s−1. Several types of microparticles were successfully dispersed.

Device for dispersal of micrometer- and submicrometer-sized particles in vacuum