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Recent advances in the mathematical description of the depth distribution of X-ray generation, o(03C1z), have permitted the quantitative analysis of multilayer structures with a precision approaching ±1 nm. A weighted average mass absorption coefficient is proposed for use in analysis with L series radiation when the energy separation of the component lines is less than the spectrometer resolution. This is shown to improve agreement between experimental data and the theoretically calculated X-ray intensities. An example of the application of the O(03C1z) method to the analysis of a titanium-boron nitride bilayer is described with special reference to the problem of detection of interfacial diffusion and oxidation phenomena.

Progress in the Characterization of Layered Structures by X-Ray Microanalysis