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Convergent beam electron diffraction (CBED) performed on plan-view samples has been considered in order to analyse strained superlattices. The composition modulation along the growth axis of multilayer materials and the strain modulation at the interfaces give rise to special features in higher order Laue zone (HOLZ) reflections. A simple model based on the expansion-contraction of the lattice spacing in each layer along the growth direction is proposed to simulate rocking curves in the kinematical approximation. Applications to Cd x Zn 1-x Se/ZnSe superlattices are discussed.

Convergent Beam Electron Diffraction Analysis of Strain in Multilayer Structures: A Kinematical Approach