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kV cold field-emission STEMs have achieved microanalysis of materials at the nanometre level in recent years. 300 kV STEMs have now been developed to improve the analytical capabilities towards the ultimate goal of atomic sensitivity. The HB603 cold field-emission (CFE) STEMs were optimised for analytical microscopy and results at 300 kV show an improvement in X- ray peak-to-background ratio by a factor of 2, and an EELS resolution of 0.4 eV In the Z-contrast imaging mode the high-resolution instrument (HB603U) achieves a point resolution of 0.13nm.

Medium-voltage field-emission STEM - the ultimate AEM