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Electron-beam-induced growth of self-supporting carbon-containing rods outside the substrate has been investigated. The influence of the beam current in the range of 1 to 80 pA on the shape and dimensions of the rods has been determined. Differences in rods growth at the edges of dielectric and metallic substrates have been demonstrated. Energy loss spectra have been recorded during rods formation and then analyzed. The obtained results have been ascribed to the accumula- tion of electrostatic charges on the formed structures.

Direct electron-beam-induced formation of nanometer-scale carbon structures in STEM. - II. The growth of rods outside the substrate