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The concept of Secondary Ion Microscopy, introduced by Castaing et al. [1], is applied to a direct imaging time-of-flight (TOF) mass spectrometer. The ion optical configuration for a particular [2] stigmatic imaging TOF mass spectrometer is reviewed. A number of fundamental factors influencing the mass resolution in any TOF spectrometer are discussed. The question of where microscope imaging offers advantages over microprobe imaging in TOF Secondary Ion Mass Spectrometry

Microscope imaging by time-of-flight secondary ion mass spectrometry