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In Extended Energy Loss Fine Structure spectroscopy (EXELFS), modulations occur- ing on the high energy slope of the ionization edges in electron energy loss spectra are investigated. These modulations supply important structural and chemical information about the local atomic en- vironment of the absorbing atoms. The accuracy and the reproducibility of the results, however, are greatly influenced by the procedures used in the data analysis. In this paper a detailed study of the analyzing method for determination of the interatomic distances is presented. A reliable FFT based deconvolution procedure for extending the method to thick samples is also described.

Strategies for determination of inter-atomic distances from extended energy loss fine structure