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The microelectronics industry through its development turns towards the miniaturization of devices in monolithic microwave circuits using broad frequency ranges. In order to perform these devices knowledge of the intrinsic properties of materials (permeability, permittivity) is required in most applications. There are different techniques for the extraction of these properties; The resonant methods: they exploit modes of a cavity loaded by a sample; and the non-resonant methods: They exploit a broadband characterization used for transmission lines.In this paper we introduce a broadband characterization method based on the extraction of the coplanar waveguide (CPW) electromagnetic parameters (characteristic impedance, propagation constant, wafer permittivity, wafer permeability, …) from the measurement of a kit composed by 5 CPWs with known dimensions. Our analytic process allows too to get the uncertainty budget for each wafer electromagnetic parameters to ensure metrological traceability up to 110 GHz.

Caractérisation électromagnétique des matériaux pour des applications industrielles jusqu’à 110 GHz