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Capacitive micromachined ultrasonic transducers (CMUTs) are microelectromechanical systems used for the generation of ultrasounds. The fundamental element of the transducer is a clamped thin metallized membrane that vibrates under voltage variations. To control such oscillations and to optimize its dynamic response it is necessary to know the modal parameters of the membrane such as resonance frequency, damping and stiffness coefficients. The purpose of this work is to identify these parameters using only the time data obtained from the membrane center displacement. Dynamic measurements are conducted in time domain and we use two methods to identify the modal parameters: a subspace method based on an innovation model of the state-space representation and the continuous wavelet transform method based on the use of the ridge of the wavelet transform of the displacement. Experimental results are presented showing the effectiveness of these two procedures in modal parameter identification.

Modal parameter identification of a CMUT membrane using response data only