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A new type of semitoroidal type sensing element is discussed in this scientific article. In the study, possible modes of vibration were identified and a working one was selected. A dynamic analysis was carried out and it was established what force is necessary to excite the resonator in order to ensure both the vibration amplitude that is convenient for reading, and the strength of the resonator. The study of the influence of the scale factor on the performance characteristics and stress strain state of the micro SE was carried out. The SE sizes were changed proportionally. The simulation was carried out with seven options concerning sizes, the calculation was performed with the help of the finite element method, for each individual case, and the results were tabulated. Based on the results obtained, graphs were plotted and conclusions were drawn concerning the influence of the scale factor on the performance characteristics and stress strain state of the device. After that, tasks were identified for further study of micro SE, as an advanced model. Finally, the references including eight sources were given.

Analysis of Influence of Scale Factor and Design on Performance Characteristics and Stress Strain State of Micro Sensing Element