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In this work, a novel vibration parameter measure instrument of rotate machine using a accelerometer is proposed. The ADXL203 micro accelerometer is used as the sensor of the instrument based on the MEMS (Micro Electro Mechanical System) technology. The mathematical modeling of the vibration is finished by the simple harmonic vibration theory. The noise of the system is disposed by the differential noise reduction circuit. The experiments such as differential noise reduction, frequency and vibration amplitude measurement are finished on the platform. The results indicate that the instrument is useful and effective.

Vibration parameters measuring system of rotate mechanical based on MEMS sensor