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This paper presents a study of the effect of a time-delay feedback controller on the dynamics of a Microelectromechanical systems (MEMS) capacitor actuated by DC and AC voltages. It is shown that negative time-delay feedback control gain can lead to an unstable system, even if AC voltage is relatively small compared to DC voltage. Perturbation method is utilized to present analytically the nonlinear dynamic characteristics of the MEMS capacitor. Agreements among the results of a shooting technique, long-time integration, basin of attraction analysis with the perturbation method are achieved

The Effect of Time-Delay Feedback Controller on an Electrically Actuated Resonator