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The deposition of molybdenum on silicon from MoF6 and H2 is studied using a microbalance setup. The deposition rate is time dependent, which is explained by the significant contribution of the reduction of MoF6 by Si. A model taking into account both deposition routes and in particular diffusion of Si through the growing layer allows to describe the observations quantitatively. The relative importance of two routes was assessed and the kinetics of the reduction by H2 could be distinguished from the overall growth kinetics. A partial reaction order of 1.4 in hydrogen was found for the reduction of MoF6 by H2. The order in MoF6 is negative

Modelling of the Deposition of Molybdenum on Silicon from Molybdenum Hexafluoride and Hydrogen