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The chemical, structural and topographical changes after the irradiation of technical oxide (Al2O3, ZrO2) and nonoxide ceramics (SiC, Si3N4) with a XeCl-Excimer Laser were studied as function of the applied energy density and number of pulses. The silicon-based nonoxide ceramics decomposed during a temperature and pressure induced process and an adherent up to 1,5 µm thick crystalline Si-layer remained on top of the specimen surface. In contrast, the oxide ceramics underwent a melting and rapid resolidification process without a chemical alteration. The minimization of surface defects on Al2O3 was used to generate a two-fold increase in Weibull's modulus m compared with untreated samples, whereas the silicon layer on top of SiC was helpful to generate and improve metal-ceramic joints between SiSiC and AlMgSi l

Excimer laser induced melting and decomposition of technical ceramic surfaces and their properties