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We describe a calibration device for absolute pressure ranging from 5 kPa to 130 kPa whose relative uncertainty contribution (k =  1), including stability, repeatability and linearity is better than 1 Pa. The device is composed of a capacitance diaphragm gauge (CDG) and a resonant silicon gauge (RSG). The good long-term stability of the calibration slope of the RSG disseminated to the CDG which in turn allows one to master the offset of the RSG, is the reason for such a low uncertainty contribution. The metrological characterisation of this working standard is presented.

A high-accuracy working standard for absolute pressure from 5 kPa to 130 kPa