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The increasing variety of optical components and materials, combined with stricter surface tolerance requirements, necessitate refining existing polishing processes and developing innovative new polishing solutions and metrology technologies. A fast, reproducible laser polishing process would offer considerable economic benefits over conventional mechanical polishing processes and interest a broad variety of optics manufacturers. In this work, a holistic approach is taken to address the various aspects of glass polishing and form correction via a novel laser polishing system design, the use of a measurement strategy that can be integrated inline and simulation results that are correlated with process parameter studies for different materials.

A new approach to laser polishing and form correction of optical components