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The concept of photonometers (alternative name of optical monitor of a vacuum deposition  process) for coating and sputtering machines is based on photonometers produced by  companies like SATIS or HV Dresden. Photometers were developed in the TOPTEC centre and  its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for  more than 10 years. The article describes current status of the technology and ideas which  will be incorporated in next development steps. Hardware and software used on coating  machines B63D, VNA600 and sputtering machine UPM810 is presented

Photonometers for coating and sputtering machines