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Chirped broadband multilayer mirrors are key components to shape attosecond pulses in the XUV range. Compressing high harmonic pulses to their Fourier limit is the major goal for attosecond physics utilizing short pulse pump-probe experiments. Here, we report about the first implementation of multilayers and diffractive optics fulfilling these requirements in the “water-window” spectral range

Broadband multilayer mirror and diffractive optics for attosecond pulse shaping in the 280-500 eV photon energy range