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Ozone is widely used for gas treatment, advanced oxidation processes, microorganisms inactivation, etc. In this research, we investigated the effect of nitrogen addition to ozone generation characteristics by atmospheric pressure Townsend discharge (APTD) type and filamentary dielectric barrier discharge (DBD) type ozone generators. The result showed that the ozone generated by the filamentary DBD increases rapidly with the increase of O2 content, and is higher than that by the APTD. On the other hand, it is interesting that the ozone generated by the APTD gradually decreases with the increase of O2 content. In order to clarify why the characteristics of ozone generation by the two kinds of discharge modes showed different dependency to the N2 content, we analyzed the exhaust gas composition using FTIR spectroscopy and calculated the rate coefficients using BOLSIG+ code. As a result, we found that although O2 content decreased with increasing N2 content, additional O atoms produced by excited N2 molecules contribute to ozone generation in case of APTD.

Effect of nitrogen addition to ozone generation characteristics by diffuse and filamentary dielectric barrier discharges at atmospheric pressure