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Electrochemical capacitors (ECC) are a fast charging devices, with high power density, capacity and increased life time. Nanostructured semiconductors are now considered as the promising materials for electrodes of such devices due to its conductive properties and effective surface. One of such materials is the porous germanium which can be used as an electrode in electrochemical capacitors. In this article the novel approach based on the method of ion implantation was developed to grow these structures. This method allows to obtain a structures up to 1 μm thick. The object of this work was the investigation of the electrophysical characteristics of samples of nanostructured porous germanium (Ge) depending on the implantation dose and surface morphology. The scientific novelty of this research lies in the search the structures with the highest effective surface area and electronic conductivity, capable of multiplying the energy capacity and specific power of ECC. Methods: The samples of amorphous Ge were grown on dielectric single-crystal substrates of Al2O3. The thickness of samples was 600 and 1000 nm. The magnetron sputtering and ion implantation methods were used to growth these structures. The irradiation with Ge+ ions produced with an energy of 40 keV and the range of implantation doses varied from 2·10 16  to 12•10 16  ion / cm 2 . The study of electrical properties was carried out on the Hall installation HL55PC at the NPP KVANT in Moscow. The following parameters were measured: the sheet concentration of carriers in the near-surface layer, electrical resistance, mobility of the charge carriers, Hall coefficient. As a result, the dependences of carriers concentration and their mobility as the function of the implantation dose and thickness of the samples of nanostructured porous germanium were determined, and the results were analyzed. Results: It was found that ion implantation of single-crystal germanium leads to an increase in the carrier concentration in the near-surface layer. To sum up, the most suitable material as an electrode for ECC is the porous germanium with the maximum dose of ion implantation and the largest thickness. The maximum sheet carrier concentration that was obtained in the study for Ge is 10 17  cm -2 .

Study of the electrophysical properties of nanostructured porous germanium as a promising material for electrodes of electrochemical capacitors