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In this paper, the analysis methods of HF components in two background series of nitrogen and sulfur hexafluoride were established and optimized. The uncertainty contribution in the weighing process was evaluated. The configuration of HF/SF6 and HF/N2 standard gases was established, that is, the packaging volume was 4L and 8L, and the content range of HF component was (50-100)×10 -6  mol/mol. Then, the stability of the value of the standard gas is investigated, that is, the stability of the value with time and pressure, the fixed value and performance investigation. The relative expanded uncertainty of two series HF standard gas prediction is less than 6% (k=2).

Configuration and Stability of HF/SF6 and HF/N2 Standard Gases