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Time and space resolved emission and laser induced fluorescence (LIF) spectroscopic measurements were performed to investigate vaporization and plasma formation resulting from excimer laser irradiation of Ti targets in a low pressure N2 atmosphere. Measurement series have been done by varying the laser intensity from the vaporization threshold at 25 MWcm'2 up to values of about 500 MWcm~ 2 typically applied in pulsed laser deposition processing of TiN films. Thus, we evidenced the transition from thermal evaporation to the high density plasma formation process, leading to the production of reactive species and high energy ions. An interesting result for the comprehension of the reactive deposition process was the observation of a quantity of dissociated and ionized nitrogen, moving with the plasma front in the direction of the substrate.

Ablation réactive d'une cible de titane par un laser XeCl en présence d'Azote