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In this article, we will analyze the possibilities that offer the micro-Raman method in the field of the solid state. Most of the examples that we shall here present are related to semiconducting materials and thin films. The characterization of these materials has clearly benefited from the advances that took place in Raman microscopy during the last two decades. The micro-Raman method is now recognized as a powerful and versatile tool for the analysis of solid films and condensed matter in general with its main feature being the chemical sensitivity. Furthermore, the Raman signal is also very sensitive to the microstructural state and other local environments of solids providing therefore information on the structure of the material on the scale of a few lattice constants. Raman signal is a function of the electron-phonon interaction, i.e. lattice vibration, and is a good complementary method to other techniques used in the characterization of the solid state such as transmission electron microscopy (TEM), X-rays diffraction, X-ray photoelectron spectroscopy (XPS), secondary ion mass spectroscopy (SIMS), Auger electron spectroscopy, etc. The micro-Raman technique has several fundamental advantages that are precious when studying solids: ‐ First of all, the method is contactless and therefore allows non destructive and quantitative microanalysis of structural and electrical properties. No sample preparation is required, which is a crucial point when characterizing processed devices, whereas most of the other techniques cited above involve a special preparation of the samples which may alter their structural properties. ‐ The high spatial resolution obtained with the Raman microscope is another fundamental benefit that allows to probe smaller dimensional scale devices. This is important for the analysis of microstructures and devices, where the properties of the layers are strongly process dependent and may differ significantly from the bulk material properties. ‐ Further, most of the semiconducting materials are quite opaque to visible light hence the high power density that is obtained with the Raman microprobe gives better results than the classical macro-Raman system. Therefore, the micro-Raman system is now one of the preferred methods when characterizing semiconducting materials and thin films.

Micro-Raman spectroscopy of the solid state: applications to semiconductors and thin films