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A NASICON solid electrolyte Li 1+ x  Al  x  Ti 2− x  (PO 4 ) 3  (LATP) in a thin film form has been developed with ionic conductivities as high as 0.1 mS cm −1 . A route to achieve a 100-fold increase in the conductivity through post-annealing is discussed.

High performance LATP thin film electrolytes for all-solid-state microbattery applications