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VO 2 (M1) films synthesized by sputtering on quartz and c-sapphire substrates exhibited good semiconductor-to-metal transition (SMT) and IR photoresponse properties.

materials advances

Enhanced phase transition and infrared photoresponse characteristics in VO<sub>2</sub>(M1) thin films synthesized by DC reactive sputtering on different substrates

Enhanced phase transition and infrared photoresponse characteristics in VO2(M1) thin films synthesized by DC reactive sputtering on different substrates

Enhanced phase transition and infrared photoresponse characteristics in VO₂(M1) thin films synthesized by DC reactive sputtering on different substrates