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In this report, a solidly mounted resonator (SMR), consisting of an Au electrode, Mg-doped ZnO (Mg X Zn 1−X O) piezoelectric film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering.

The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators