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When a CuCl/Si mixture was pretreated at 200-240 °C in a N 2 atmosphere, trimethoxysilane was predominantly formed in the direct reaction of silicon with methanol. When the pretreatment temperatures were raised to 260-340 °C, tetramethoxysilane was favorably formed. The Cu  x  Si  y  Cl  z  species catalyzed the reaction between silicon and methanol to trimethoxysilane. Chlorination of the spent CuCl/Si mixture promoted the reaction between silicon and methanol to form both trimethoxysilane and tetramethoxysilane due to the recovery of the CuCl phase and the exposure of the metallic Cu 0 phase. When Cu 2 O, CuO, and Cu 0 were used as the catalysts, tetramethoxysilane was formed as the main product.

Direct reaction between silicon and methanol over Cu-based catalysts: investigation of active species and regeneration of CuCl catalyst