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Inkjet printing of 8% Y2O3-stabilized ZrO2 (YSZ) thin films is achieved bydesigning a novel water-based reactive ink for Drop-on-Demand (DoD) inkjetprinting. The ink formulation is based on a novel chemical strategy thatconsists of a combination of metal oxide precursors (zirconium alkoxide andyttrium salt), water and a nucleophilic agent, i.e. n-methyldiethanolamine(MDEA). This chemistry leads to metal-organic complexes with long term inkstability and high precision printability. Ink rheology and chemical reactivityare analyzed and controlled in terms of metal-organic interactions in thesolutions. Thin dense nanocrystalline YSZ film below 150 nm are obtained by lowtemperature calcination treatments (400-500 {\deg}C), making the depositionsuitable for a large variety of substrates, including silicon, glass andmetals. Thin films and printed patterns achieve full densification with nolateral shrinkage and high ionic conductivity.

Aqueous metal-organic solutions for YSZ thin film inkjet deposition