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TiO 2 films are grown on LaAlO 3 (001), Si (100) and SiO 2 substrates by reactive radio frequency sputtering. X-ray diffraction (XRD) pole figures revealed important characteristics about the texture and phase distribution on those films. Combined with spectroscopic ellipsometry, the pole figures allowed the analysis of the growth characteristics over the whole volume of the layers. Details in the microstructure of the films were probed using transmission electron spectroscopy. Anatase is the dominating phase in the films grown on all substrates. On TiO 2 /LaAlO 3 fims, the mosaicity is very low, so that the pole figure closely resembles that of anatase monocrystals. Detailed inspection of XRD pole figures reveals a small amount of rutile in the TiO 2 /LaAlO 3 films. For the growth of TiO 2 onto SiO 2 , rutile and brookite phases are also detected. Transmission electron microscopy and XRD results show the formation of anatase {112} twins in films grown on the different substrates, suggesting that the anatase {112} twin mediates the growth of rutile and brookite phases. Optical results are in agreement with the XRD observations: the optical properties of TiO 2 /LaAlO 3 films are similar to the ordinary values of bulk anatase crystals, indicating the orientation of the film in the [001] direction, whereas results for TiO 2 /SiO 2 are compatible with lower crystalline ordering.

Influence of substrate on the structure of predominantly anatase TiO2films grown by reactive sputtering

Influence of substrate on the structure of predominantly anatase TiO₂films grown by reactive sputtering