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We report on nanoengineered SrTiO 3 -Sm 2 O 3 nanocomposite thin films with the highest reported values of commutation quality factor (CQF or K-factor) of &gt;2800 in SrTiO 3 at room temperature. The films also had a large tunability of dielectric constant (49%), low tangent loss (tan δ = 0.01) and a Curie temperature for SrTiO 3 &gt; 300 °C, making them very attractive for tunable RF applications. The enhanced properties originate from the unique nanostructure in the films, with &lt;20 nm diameter strain-controlling Sm 2 O 3 nanocolumns embedded in a SrTiO 3 matrix. Very large out-of-plane strains (up to 2.6%) and high tetragonality (c/a) (up to 1.013) were induced in the SrTiO 3 . The K-factor was further enhanced by adding 1 at% Sc 3+ (acceptor) dopant in SrTiO 3 to a value of 3300 with the tangent loss being ≤0.01 up to 1000 kV cm -1 .

nanoscale

Very high commutation quality factor and dielectric tunability in nanocomposite SrTiO3 thin films with Tc enhanced to &gt;300 °C