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Amorphous lithium–silicon compounds are promising materials inorder to improve pure silicon as a high-capacity anode material inlithium-ion batteries. We demonstrated that it is possible to produceamorphous LixSi (x ~ 0.4) thin films by reactive ion-beam cosputteringof a segmented solid state target composed of metalliclithium and elemental silicon. At the surface a graded LixSiOy layer ofsome nanometer thickness is formed by contact with air which seemsto prevent decomposition of the LixSi.GEEN

Li–Si thin films for battery applications produced by ion-beam co-sputtering