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In this work, we report a physical deposition based, compact (cp) layer synthesis for planar heterojunction perovskite solar cells. Typical solution-based synthesis of cp layer for perovskite solar cells involves low-quality of thin films, high-temperature annealing, non-flexible devices, limitation of large-scale production and that the effects of the cp layer on carrier transport have not been fully understood. In this research, using radio frequency magnetron sputtering (RFMS), TiO 2  cp layers were fabricated and the thickness could be controlled by deposition time; CH 3 NH 3 PbI 3  films were prepared by evaporation & immersion (E & I) method, in which PbI 2  films made by thermal evaporation technique were immersed in CH 3 NH 3 I solution. The devices exhibit power conversion efficiency ( PCE ) of 12.1% and the photovoltaic performance can maintain 77% of its initial  PCE  after 1440 h. The method developed in this study has the capability of fabricating large active area devices (40 × 40 mm 2 ) showing a promising  PCE  of 4.8%. Low temperature and flexible devices were realized and a  PCE  of 8.9% was obtained on the PET/ITO substrates. These approaches could be used in thin film based solar cells which require high-quality films leading to reduced fabrication cost and improved device performance.

Radio Frequency Magnetron Sputtering Deposition of TiO2 Thin Films and Their Perovskite Solar Cell Applications