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Tungsten doped titanium dioxide films with both transparent conducting oxide (TCO) and photocatalytic properties were produced  via  aerosol-assisted chemical vapor deposition of titanium ethoxide and dopant concentrations of tungsten ethoxide at 500 °C from a toluene solution. The films were anatase TiO 2,  with good  n -type electrical conductivities as determined  via  Hall effect measurements. The film doped with 2.25 at.% W showed the lowest resistivity at 0.034 Ω.cm and respectable charge carrier mobility (14.9 cm 3 /V.s) and concentration (×10 19  cm −3 ). XPS indicated the presence of both W 6+  and W 4+  in the TiO 2  matrix, with the substitutional doping of W 4+  inducing an expansion of the anatase unit cell as determined by XRD. The films also showed good photocatalytic activity under UV-light illumination, with degradation of resazurin redox dye at a higher rate than with undoped TiO 2 .

Tungsten Doped TiO2 with Enhanced Photocatalytic and Optoelectrical Properties via Aerosol Assisted Chemical Vapor Deposition